A Novel Method of MEMS System-level Modeling via Multi-Domain Virtual Prototyping in SystemC-AMS

Micro Electro-Mechanical Systems (MEMS) have been developed for years and find a wide range of applications. Nevertheless, there is still a lack of efficient collaboration between expert teams involved in MEMS design to enable an efficient multidisciplinary approach. Furthermore, the shrinking of the systems’ size and their growing integration level require to design HW and SW subsystems in a more parallel and integrated way. This work is focused on improving the MEMS design methodology and its integration into the overall HW/SW system design flow by using SystemC AMS extensions. A novel method for system-level modeling of MEMS in SystemC-AMS is proposed. Based on Reduced-Order Modeling, it intends to meet the system-level requirements for an efficient simulation in terms of speed, accuracy, and configurability.